Calibration of Scanning Thermal Microscope using Optimal Estimation of Function Parameters by Iterated Linearization

Scanning thermal microscopy is a unique tool for the study of thermal properties at the nanoscale. However, calibration of the method is a crucial problem. When analyzing local thermal conductivity, direct calibration is not possible and reference samples are used instead. As the calibration dependence is non-linear and there are only a few calibration points, this represents a metrological challenge that needs complex data processing. In this contribution we present use of the OEFPIL algorithm for robust and single-step evaluation of local thermal conductivities and their uncertainties, simplifying this procedure. Furthermore, we test the suitability of SThM calibration for automated measurement.