Towards quantitative Low Energy Ion Scattering on CaSiO$_3$ from Comparison to Multiple-Scattering-Resolved Dynamical Binary Collision Approximation Simulations

We perform Low Energy Ion Scattering with 1\,keV He ions on CaSiO$_3$ using a commercial electrostatic detector system and determine the charge fraction of scattered ions from comparison with Binary Collision Approximation simulations. The simulations take dynamical surface changes due to surface cleaning Ar sputtering into account and scattered He particles are separated into single, dual, and multiple scattering trajectories. We find that the charge fraction of single and dual scattered He is about 10 times higher than the one for multiple collisions. Our results show that quantitative concentration profiles can be inferred from this method, if the charge fraction components are determined first.