Massive dissipation dilution of a nanomechanical torsion resonator
Abstract
Strained nanomechanical resonators have been shown to exhibit ultrahigh quality factors due to dissipation dilution. While the mechanism of dissipation dilution has been extensively studied for transverse flexural modes of nanobeams and membranes, it is commonly held that it does not apply to torsion modes. Here we show that torsion modes can experience massive dissipation dilution due to tensile stress and draw a connection to a century-old theory from the torsion balance community that suggests that a torsion beam is naturally soft-clamped. Enabling this advance is the fabrication of high-stress Si3 N4 nanobeams with width-to-thickness ratios of 104 and the discovery that their torsion modes have Q factors that scale as the width-to-thickness ratio squared, yielding Q factors as high as 108 and Q-frequency products as high as 1013 Hz. By disrupting a commonly held belief in the nanomechanics community, our findings invite a rethinking of strategies towards quantum experiments and precision measurement with nanomechanical resonators.
This work is supported by the National Science Foundation Grant OIA-2134830.- Publication:
-
APS March Meeting Abstracts
- Pub Date:
- March 2022
- Bibcode:
- 2022APS..MARD33003C