Meniscus-mode: A novel operation mechanism for signal amplification in capacitive micromachined ultrasonic transducers
Abstract
A novel operation mode for CMUTs that employs the meniscus formed by the surface tension of the water for signal amplification is presented. Finite element simulations were presented to model the phenomenon. A fabricated CMUT tested in a pulse-echo setup was used to demonstrate the phenomenon experimentally. Amplification ratios that reach up to ∼2.24× compared to the traditional full-immersion operation case are reported.
- Publication:
-
Sensors and Actuators A: Physical
- Pub Date:
- March 2021
- DOI:
- Bibcode:
- 2021SeAcA.31912549T
- Keywords:
-
- CMUT;
- Microelectromechanical systems (MEMS);
- Contact angle;
- Surface tension;
- Capacitive;
- Micromachined;
- Ultrasonics