The formation of porous silicon by irradiation with low-energy ions Kudriavtsev, Yu ; Hernandez-Zanabria, A. ; Salinas, C. ; Asomoza, R. Abstract Publication: Vacuum Pub Date: July 2020 DOI: 10.1016/j.vacuum.2020.109393 Bibcode: 2020Vacuu.177j9393K