UV curing materials for wafer level optics
Abstract
Wafer level imprinting using transparent UV curable materials offers high flexibility in design, scalability and low total cost of ownership. Development of materials requires a careful balancing of all relevant properties including optical function, process constraints, (thermo-) mechanical properties and stability under reliability testing. DELO developed a modular system of materials which can be modified in this wide parameter space. These materials include highly transparent materials with refractive indices starting at below 1.4 and stretching to above 1.7 and also excellent mechanical as well as reliability performance.
- Publication:
-
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIII
- Pub Date:
- February 2020
- DOI:
- 10.1117/12.2545767
- Bibcode:
- 2020SPIE11292E..0IB