Study of the surface species during thermal and plasma-enhanced atomic layer deposition of titanium oxide films using in situ IR-spectroscopy and in vacuo X-ray photoelectron spectroscopy
Abstract
- Publication:
-
Physical Chemistry Chemical Physics (Incorporating Faraday Transactions)
- Pub Date:
- May 2020
- DOI:
- 10.1039/D0CP00395F
- Bibcode:
- 2020PCCP...22.9262V