Improvement of ionization yield in sputtered neutral mass spectrometry using pulsed infrared and ultraviolet lasers
Abstract
- Publication:
-
Journal of Vacuum Science Technology B: Microelectronics and Nanometer Structures
- Pub Date:
- May 2020
- DOI:
- 10.1116/6.0000088
- Bibcode:
- 2020JVSTB..38c4011S