Simplified patterning process for the selective 1D ZnO nanorods growth
Abstract
- Publication:
-
Journal of Vacuum Science Technology B: Microelectronics and Nanometer Structures
- Pub Date:
- January 2020
- DOI:
- 10.1116/1.5131363
- Bibcode:
- 2020JVSTB..38a2204G