Wiring Techniques for Large Size Silicon Probe Using Electroplating Aono, Takanori ; Kanamaru, Masatoshi ; Kohno, Ryuji ; Hosogane, Atsushi Abstract Publication: IEEJ Transactions on Sensors and Micromachines Pub Date: April 2020 DOI: 10.1541/ieejsmas.140.84 Bibcode: 2020IJTSM.140...84A