Exploiting nonlinearity to enhance the sensitivity of mode-localized mass sensor based on electrostatically coupled MEMS resonators
Abstract
- Publication:
-
International Journal of Non Linear Mechanics
- Pub Date:
- May 2020
- DOI:
- 10.1016/j.ijnonlinmec.2020.103455
- Bibcode:
- 2020IJNLM.121j3455L