(Invited) Development of CMOS-MEMS Cointegrated Pressure Sensor Using Minimal Fab Process Liu, Yongxun ; Akita, Ippei ; Matsukawa, Takashi ; Tanaka, Hiroyuki ; Koga, Kazuhiro ; Nemoto, Kazumasa ; Khumpuang, Sommawan ; Nagao, Masayoshi ; Morita, Yukinori ; Hara, Shiro Abstract Publication: ECS Transactions Pub Date: April 2020 DOI: 10.1149/09701.0035ecst Bibcode: 2020ECSTr..97a..35L