Guiding of LIPSS formation by excimer laser irradiation of pre-patterned polymer films for tailored hierarchical structures
Abstract
Laser-induced periodical surface structures (LIPSS) are formed at pre-patterned films. LIPSS at top surface and sidewalls of the patterned photoresist film were found. The parallel orientation of laser polarization and pre-pattern cause well-ordered LIPSS. LIPSS height increase with pulse number and saturates at approx. 65 nm. LIPSS quality and defect density are influenced by the patters size and shape.
- Publication:
-
Applied Surface Science
- Pub Date:
- March 2020
- DOI:
- 10.1016/j.apsusc.2019.144785
- Bibcode:
- 2020ApSS..50644785E
- Keywords:
-
- LIPSS;
- Hierarchical structures;
- Excimer laser;
- Nanosecond;
- Laser-induced surface structures;
- Polymer;
- Film