Multiobjective optimization for target design in diffraction-based overlay metrology Shi, Yating ; Li, Kuangyi ; Chen, Xiuguo ; Wang, Peng ; Gu, Honggang ; Jiang, Hao ; Zhang, Chuanwei ; Liu, Shiyuan Abstract Publication: Applied Optics Pub Date: March 2020 DOI: 10.1364/AO.387066 Bibcode: 2020ApOpt..59.2897S