Mass spectrometric study of O, O2(a1Δg) and O3 in time-modulated RF driven atmospheric pressure plasma jets
Abstract
A molecular beam mass spectrometer (MBMS) was established to measure fluxes of neutral and ionic species from atmospheric pressure plasma at a substrate. In this work, we report the first measurements of absolute densities of O2(a1Δg) in an atmospheric pressure plasma jet (APPJ) by MBMS. The ability to measure spatial profiles of O2(a1Δg) impinging on a substrate in the effluent of the APPJ is a key advantage of the MBMS over previously reported optical methods. The measured large O2(a1Δg) densities in the APPJ effluent, up to one order of magnitude higher than the O density, underline the potential importance of O2(a1Δg) in many applications. In addition, we also investigate the change of species fluxes impinging on a dielectric substrate for touching and non-touching conditions by equipping the MBMS with a dielectric sampling plate. Spatially resolved measurements of neutral and ionic species in an He +1% O2 RF-driven APPJ are reported. The spatially resolved distribution of O, O2(a1Δg) and O3is dominated by convection and, remarkably shows minimum differences between touching and non-touching conditions.
This work was supported by the National Science Foundation (CBET 1703439) and US Department of Energy, Office of Fusion Energy Sciences under Award Number DE-SC0001939, DE-SC0016053 and DE-SC0020232.- Publication:
-
APS Annual Gaseous Electronics Meeting Abstracts
- Pub Date:
- 2020
- Bibcode:
- 2020APS..GECXF2005J