TiN film growth on misoriented TiN grains with simultaneous low-energy bombardment: Restructuring leading to epitaxy
Abstract
- Publication:
-
Thin Solid Films
- Pub Date:
- October 2019
- DOI:
- 10.1016/j.tsf.2019.06.030
- Bibcode:
- 2019TSF...688m7380E