Sensing Amorphous/Crystalline Silicon Surface Passivation by Attenuated Total Reflection Infrared Spectroscopy of Amorphous Silicon on Glass
Abstract
- Publication:
-
Semiconductors
- Pub Date:
- August 2019
- DOI:
- 10.1134/S1063782619080244
- Bibcode:
- 2019Semic..53.1114A