Gallium nitride thin films by microwave plasma-assisted ALD Romo-García, F. ; Higuera-Valenzuela, H. J. ; Cabrera-German, D. ; Berman-Mendoza, D. ; Ramos-Carrazco, A. ; Contreras, O. E. ; García-Gutierrez, R. Abstract Publication: Optical Materials Express Pub Date: November 2019 DOI: 10.1364/OME.9.004187 Bibcode: 2019OMExp...9.4187R