Thermal annealing study of the mid-infrared aluminum nitride on insulator (AlNOI) photonics platform Dong, Bowei ; Luo, Xianshu ; Zhu, Shiyang ; Hu, Ting ; Li, Mo ; Hasan, Dihan ; Zhang, Li ; Chua, Soo Jin ; Wei, Jingxuan ; Chang, Yuhua ; Ma, Yiming ; Vachon, Philippe ; Lo, Guo-Qiang ; Ang, Kah Wee ; Kwong, Dim-Lee ; Lee, Chengkuo Abstract Publication: Optics Express Pub Date: July 2019 DOI: 10.1364/OE.27.019815 Bibcode: 2019OExpr..2719815D