Membrane InGaAsP Mach-Zehnder modulator with SiN:D waveguides on Si platform Hiraki, Tatsurou ; Aihara, Takuma ; Takeda, Koji ; Fujii, Takuro ; Kakitsuka, Takaaki ; Tsuchizawa, Tai ; Fukuda, Hiroshi ; Matsuo, Shinji Abstract Publication: Optics Express Pub Date: June 2019 DOI: 10.1364/OE.27.018612 Bibcode: 2019OExpr..2718612H