Upgrades of a time-of-flight elastic recoil detection analysis measurement system for thin film analysis
Abstract
A time-of-flight elastic recoil detection analysis measurement system has been developed for analyzing the light elements in thin films. The system consists of two time detectors and a silicon detector, and the energy and time-of-flight of recoil ions are measured simultaneously. This system has been tested using He, C, and Cu beams with energies between 2 and 20 MeV. Depth resolutions at the surface of a thin carbon layer were 1.3 ± 0.1 nm with a 2-MeV 4He beam and 1.6 ± 0.2 nm with a 5-MeV 63Cu beam. The sensitivity of oxygen measurements was evaluated to be 3.8 × 1014 cm-2 when using a 12-MeV 63Cu beam.
- Publication:
-
Nuclear Instruments and Methods in Physics Research B
- Pub Date:
- March 2019
- DOI:
- 10.1016/j.nimb.2019.01.004
- Bibcode:
- 2019NIMPB.442...53Y
- Keywords:
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- Time-of-flight elastic recoil detection analysis;
- Light element analysis;
- Depth resolution;
- Sensitivity