Mapping Ferroelectricity in Hafnia Thin Films with STEM EBIC Chan, Ho Leung ; Hubbard, William A. ; Lodico, Jared J. ; Regan, B. C. Abstract Publication: Microscopy and Microanalysis Pub Date: August 2019 DOI: 10.1017/S1431927619009966 Bibcode: 2019MiMic..25S1846C