Ellipsometric analysis of concentration gradients induced in semiconductor crystals by pulsed laser induced epitaxy
Abstract
- Publication:
-
Journal of Vacuum Science Technology B: Microelectronics and Nanometer Structures
- Pub Date:
- November 2019
- DOI:
- 10.1116/1.5122777
- Bibcode:
- 2019JVSTB..37f1213S