I-V characteristics of magnetron with hot target sputtered in three-component gas mixture
Abstract
The discharge current-voltage characteristics of a dc magnetron with a single cold titanium target and a single hot titanium target in Ar + N2 + O2 environment were studied. Two series of experiments, in which the flow rates of nitrogen Q N 2 and oxygen Q o 2 played different roles, were performed. In the first series, O2 was introduced into a mixture of Ar + N2 (Q N 2 = const and Q o 2 = var). In the second one, N2 was introduced into a mixture of Ar + O2 (Q N 2 = const and Q o 2 = var). It was found that the I-V characteristics of the studied sputtering instruments measured in the current density range of 10-200 mA/cm2 differ significantly. The I-V characteristics of a magnetron with a cold target can have one maximum or jump. The I-V characteristics of a magnetron with a hot target have two maxima and one minimum in one case, and in the other case, there is only one maximum.
- Publication:
-
Journal of Physics Conference Series
- Pub Date:
- September 2019
- DOI:
- 10.1088/1742-6596/1313/1/012048
- Bibcode:
- 2019JPhCS1313a2048S