Dynamic bifurcation MEMS gas sensors
Abstract
A novel electrostatic MEMS gas sensor is demonstrated. It employs a dynamic-bifurcation detection technique. The sensor detects ethanol vapor in a binary mode, reporting ON-state (1) for concentrations above a preset threshold and OFF-state (0) for concentrations below the threshold. The sensing mechanism exploits the qualitative difference between the sensor state before and after the dynamic pull-in bifurcation.
- Publication:
-
Journal of Micromechanics and Microengineering
- Pub Date:
- January 2019
- DOI:
- Bibcode:
- 2019JMiMi..29a5005A
- Keywords:
-
- electrostatic MEMS;
- gas sensors;
- bifurcation-based sensing;
- binary detection