Impact of Sputtering Power on Amorphous In-Al-Zn-O Films and Thin Film Transistors Prepared by RF Magnetron Sputtering
Abstract
- Publication:
-
IEEE Transactions on Electron Devices
- Pub Date:
- May 2019
- DOI:
- 10.1109/TED.2019.2906892
- Bibcode:
- 2019ITED...66.2219X