Experimental Studies in Micromachined AT-Cut Quartz-Based Differential Vacuum Gauges Goel, Nishit ; Costanzo, Francesco ; Tadigadapa, Srinivas Abstract Publication: IEEE Sensors Journal Pub Date: March 2019 DOI: 10.1109/JSEN.2018.2885956 Bibcode: 2019ISenJ..19.2047G