Effects of Annealing on Ferroelectric Hafnium-Zirconium-Oxide-Based Transistor Technology Chen, Yi-Hsuan ; Su, Chun-Jung ; Hu, Chenming ; Wu, Tian-Li Abstract Publication: IEEE Electron Device Letters Pub Date: March 2019 DOI: 10.1109/LED.2019.2895833 Bibcode: 2019IEDL...40..467C