Study of Elemental Depth Distribution in the Multilayer Material (\text{TiO}_2)/(\text{SiO}_2)/Si by Rutherford Backscattering Spectrometry (RBS)
Abstract
- Publication:
-
Communications in Physics
- Pub Date:
- November 2019
- DOI:
- 10.15625/0868-3166/29/3SI/14328
- Bibcode:
- 2019CPhy...29..393P