Electromagnetic analysis for optical coherence tomography based through silicon vias metrology Iff, W. A. ; Hugonin, J. -P. ; Sauvan, C. ; Besbes, M. ; Chavel, P. ; Vienne, G. ; Milord, L. ; Alliata, D. ; Herth, E. ; Coste, P. ; Bosseboeuf, A. Abstract Publication: Applied Optics Pub Date: September 2019 DOI: 10.1364/AO.58.007472 Bibcode: 2019ApOpt..58.7472I