Fabrication of Al 2 O 3 nano-micro patterns by Al 2 O 3 dispersion resin using UV imprint lithography Park, Jaemin ; Sung, Young Hoon ; Son, Soomin ; Jun, Junho ; Huh, Daihong ; Lee, Heon Abstract Publication: Thin Solid Films Pub Date: August 2018 DOI: 10.1016/j.tsf.2018.05.028 Bibcode: 2018TSF...660..428P