1 million-Q optomechanical microdisk resonators for sensing with very large scale integration

Cavity optomechanics have become a promising route towards the development of ultrasensitive sensors for a wide range of applications including mass, chemical and biological sensing. In this study, we demonstrate the potential of Very Large Scale Integration (VLSI) with state-of-the-art low-loss performance silicon optomechanical microdisks for sensing applications. We report microdisks exhibiting optical Whispering Gallery Modes (WGM) with 1 million quality factors, yielding high displacement sensitivity and strong coupling between optical WGMs and in-plane mechanical Radial Breathing Modes (RBM). Such high-Q microdisks with mechanical resonance frequencies in the 10² MHz range were fabricated on 200 mm wafers with Variable Shape Electron Beam lithography. Benefiting from ultrasensitive readout, their Brownian motion could be resolved with good Signal-to-Noise ratio at ambient pressure, as well as in liquid, despite high frequency operation and large fluidic damping: the mechanical quality factor reduced from few 10³ in air to 10's in liquid, and the mechanical resonance frequency shifted down by a few percent. Proceeding one step further, we performed an all-optical operation of the resonators in air using a pump-probe scheme. Our results show our VLSI process is a viable approach for the next generation of sensors operating in vacuum, gas or liquid phase.