Improving the Silicon Surface Passivation by Aluminum Oxide Grown Using a Non-Pyrophoric Aluminum Precursor
Abstract
- Publication:
-
Physica Status Solidi Rapid Research Letters
- Pub Date:
- July 2018
- DOI:
- 10.1002/pssr.201800156
- Bibcode:
- 2018PSSRR..1200156L