Multislice Imaging of Integrated Circuits by X-ray Ptychography Shimomura, Kei ; Hirose, Makoto ; Higashino, Takaya ; Takahashi, Yukio Abstract Publication: Microscopy and Microanalysis Pub Date: August 2018 DOI: 10.1017/S1431927618012552 Bibcode: 2018MiMic..24S..26S