Research of the effect of bias voltage on the morphology, structure and lattice spacings of the Nb coatings deposited by inverted magnetron
Abstract
Using the metallography and X-ray diffraction analysis the effect of the bias voltage on the substrate on the structure, morphology, texture, and lattice parameters of Nb coatings deposited by an inverted cylindrical magnetron has been investigated. It is shown that the coatings are characterized by increased lattice spacings compared with pure niobium, which can be associated with both oxygen and hydrogen saturation and the presence of compressive residual stresses.
- Publication:
-
Journal of Physics Conference Series
- Pub Date:
- November 2018
- DOI:
- 10.1088/1742-6596/1121/1/012019
- Bibcode:
- 2018JPhCS1121a2019L