Optical planar waveguides based on tungsten-tellurite glass fabricated by rf-sputtering
Abstract
Planar waveguides based on tungsten-tellurite glasses doped with erbium and ytterbium ions are created. Planar structures with a superimposed strip based on tungsten tellurite glasses were formed by methods of Radio Frequency Magnetron Sputtering and lithography. Waveguide operation up to 1.53 mkm was observed. Optical losses at a wavelength of 1.53 mkm in the test channel waveguides with a width of 15 μm are 0.44 dB/cm. The dependence of the optical signal enhancement at a wavelength of 1.53 mkm on the pump power was investigated for different lengths of waveguide.
- Publication:
-
Journal of Non Crystalline Solids
- Pub Date:
- January 2018
- DOI:
- 10.1016/j.jnoncrysol.2017.08.015
- Bibcode:
- 2018JNCS..480...70G
- Keywords:
-
- Planar optical waveguides;
- Radio Frequency Magnetron Sputtering;
- Tungsten-tellurite glasses doped with Er and Yb ions;
- Spectroscopic ellipsometry;
- Optical signal enhancement