Development of MEMS-Based Lamb Wave Acoustic Devices Rana, Lokesh ; Gupta, Reema ; Sharma, Anjali ; Tomar, Monika ; Gupta, Vinay Abstract Publication: IEEE Transactions on Electron Devices Pub Date: April 2018 DOI: 10.1109/TED.2018.2805698 Bibcode: 2018ITED...65.1523R