High-fidelity large area nano-patterning of silicon with femtosecond light sheet
Abstract
We employ a femtosecond light sheet generated by a cylindrical lens to rapidly produce high-fidelity nano-structures over large area on silicon surface. The Fourier analysis of electron microscopy images of the laser-induced surface structures reveals sharp peaks indicating good homogeneity. We observed an emergence of second-order spatial periodicity on increasing the scan speed. Our reliable approach may rapidly nano-pattern curved solid surfaces and tiny objects for diverse potential applications in optical devices, structural coloring, plasmonic substrates and in high-harmonic generation.
- Publication:
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Applied Physics A: Materials Science & Processing
- Pub Date:
- January 2018
- DOI:
- 10.1007/s00339-017-1459-3
- Bibcode:
- 2018ApPhA.124...46S