Ultrahigh-resolution phase-only LCOS spatial light modulator
Abstract
We report about the implementation of the 10Megapixel phase-only liquid crystal on silicon spatial light modulator for the visible and short-wave infrared spectral bands. The pixel pitch of the SLM is less than 4 micron. Experimental data for diffraction efficiency, reflectivity, phase response, flatness and temporal noises is provided.
- Publication:
-
Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series
- Pub Date:
- February 2017
- DOI:
- 10.1117/12.2250531
- Bibcode:
- 2017SPIE10125E..0ML