Multi-layer topography measurement using a new hybrid single-shot technique: Chromatic Confocal Coherence Tomography (CCCT) - NASA/ADS

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Multi-layer topography measurement using a new hybrid single-shot technique: Chromatic Confocal Coherence Tomography (CCCT)

Publication:: Optics Express
Pub Date:: May 2017
DOI:: 10.1364/OE.25.010204
Bibcode:: 2017OExpr..2510204B

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