ダイヤモンド・ライク・カーボン(DLC)膜とその応用展開; ダイヤモンド・ライク・カーボン(DLC)膜とその応用展開; Characteristics and Applications of Diamond Like Carbon (DLC) Films
Abstract
- Publication:
-
Journal of the Vacuum Society of Japan
- Pub Date:
- 2017
- DOI:
- 10.3131/jvsj2.60.428
- Bibcode:
- 2017JVSJ...60..428M