The characterization of Cu-doped ZnO thin films prepared by using radio-frequency reactive magnetron sputtering
Abstract
Textured zinc-oxide (ZnO) thin films and Cu-doped ZnO (ZnO:Cu) thin films are deposited on glass substrates by using radio-frequency reactive magnetron sputtering. The effect of Cu-doping concentration on the crystallization behavior, surface morphology, transmission spectrum, and luminescence properties of the ZnO thin films are systematically investigated by using X-ray diffraction, scanning probe microscopy and photoluminescence spectra. The results indicate that the crystallization quality, morphology, transmission, and luminescence of the ZnO films is affected by Cu-element doping. A stronger preferred orientation toward the c-axis is obtained after Cu doping at an appropriate concentration (3%). The transmittance rate gradually decreases with increasing Cu doping concentration. In the photoluminescence spectra of the samples measured at room temperature, four main emission peaks are observed: a violet peak located at about 390 nm, two blue peaks, one located at about 445 nm and the other at about 485 nm, and a green peak located at about 527 nm. The origins of these emissions are discussed in detail.
- Publication:
-
Journal of Korean Physical Society
- Pub Date:
- May 2017
- DOI:
- 10.3938/jkps.70.856
- Bibcode:
- 2017JKPS...70..856C
- Keywords:
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- ZnO:Cu thin films;
- RF magnetron sputtering;
- Microstructure;
- Optical properties