ブリッジ構造の共振子と磁歪膜をもつMEMS磁気センサ; ブリッジ構造の共振子と磁歪膜をもつMEMS磁気センサ; MEMS Magnetic Sensor with Bridge-type Resonator and Magneto-strictive Thin Film
Abstract
- Publication:
-
IEEJ Transactions on Sensors and Micromachines
- Pub Date:
- 2017
- DOI:
- 10.1541/ieejsmas.137.234
- Bibcode:
- 2017IJTSM.137..234O