Effect of water-cooling and sheath gas-cooling in a jet driven by RF-ICP studied by means of numerical simulation
Abstract
A two-dimensional axisymmetric numerical study has been carried out to analyze the Ar jet driven by the radio frequency of 13.56 MHz under the condition of the chamber pressure of 0.1 atm in the inductively coupled plasma (ICP). The flow field, the temperature field and the electromagnetic field are evaluated under the condition of different cooling methods, i.e., sheath gas-cooling and water-cooling. Based on the calculated data, we have found that the temperature homogeneous zone is larger by using the water-cooling method than that of sheath gas-cooling case. The energy density in the former case is 1.6E7 W/m3, over one and a half times the sheath gas-cooling method, which means that the energy consumption efficiency is higher under the condition of water-cooling rather than that of the sheath gas-cooling.
- Publication:
-
Diamond and Related Materials
- Pub Date:
- March 2017
- DOI:
- 10.1016/j.diamond.2016.12.012
- Bibcode:
- 2017DRM....73...72B
- Keywords:
-
- ICP-RF plasma;
- Numerical simulation;
- Diamond deposition