A novel vibration sensor based on phase grating interferometry

Vibration sensors with high accuracy and reliability are needed urgently for vibration measurement. In this paper a vibration sensor with nanometer resolution is developed. This sensor is based on the principle of phase grating interference for displacement measurement and spatial polarization phase-shift interference technology, and photoelectric counting and A/D signal subdivision are adopted for vibration data output. A vibration measurement system consisting of vibration actuator and displacement adjusting device has been designed to test the vibration sensor. The high resolution and high reliability of the sensor are verified through a series of comparison experiments with Doppler interferometer.