New leak element using anodic aluminum oxide Zhao, Yongheng ; Cheng, Yongjun ; Zhang, Qi ; Wei, Wei ; Qiu, Keqiang ; Sun, Lichen ; Li, Detian ; Wang, Xudi Abstract Publication: Vacuum Pub Date: September 2016 DOI: 10.1016/j.vacuum.2016.06.007 Bibcode: 2016Vacuu.131..111Z