On a reduction in cracking upon the growth of AlN on Si substrates by hydride vapor-phase epitaxy Sharofidinov, Sh. Sh. ; Nikolaev, V. I. ; Smirnov, A. N. ; Chikiryaka, A. V. ; Nikitina, I. P. ; Odnoblyudov, M. A. ; Bugrov, V. E. ; Romanov, A. E. Abstract Publication: Semiconductors Pub Date: April 2016 DOI: 10.1134/S1063782616040217 Bibcode: 2016Semic..50..541S