Suspended silicon mid-infrared waveguide devices with subwavelength grating metamaterial cladding Penades, J. Soler ; Ortega-Moñux, A. ; Nedeljkovic, M. ; Wangüemert-Pérez, J. G. ; Halir, R. ; Khokhar, A. Z. ; Alonso-Ramos, C. ; Qu, Z. ; Molina-Fernández, I. ; Cheben, P. ; Mashanovich, G. Z. Abstract Publication: Optics Express Pub Date: October 2016 DOI: 10.1364/OE.24.022908 Bibcode: 2016OExpr..2422908P