M-342DG キャパシタンスゲージ; M-342DG キャパシタンスゲージ; Capacitance Diaphragm Gauge M-342DG Miyashita, Haruzo ; Onuma, Hisayuki ; Ide, Yosuke ; Mochizuki, Isao ; Saito, Noriyuki Abstract Publication: Journal of the Vacuum Society of Japan Pub Date: 2016 DOI: 10.3131/jvsj2.59.255 Bibcode: 2016JVSJ...59..255M