Optimization of power output in planar thermoelectric microgenerators based on Si nanowires
Abstract
This work reports the efforts to optimize the output power achieved with all-silicon thermoelectric microgenerators based on MEMS fabrication technology and silicon nanowires as active material. Recent improvements introduced in both the fabrication process and the device design are described, and a set of experimental results obtained with both device types (new vs. old design/process) are provided to assess the impact of the different modifications on thermal and electrical performance, as well as in the overall harvested power.
- Publication:
-
Journal of Physics Conference Series
- Pub Date:
- November 2016
- DOI:
- 10.1088/1742-6596/773/1/012026
- Bibcode:
- 2016JPhCS.773a2026C